ION ASSISTED COATING PROCESSES AND APPLICATIONS

被引：7

作者：

DEARNALEY, G

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷

关键词：

D O I：

10.1016/0168-583X(89)91048-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：571 / 574

页数：4

共 11 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[2]

BURNETT PJ, 1986, I PHYSICS C SERIES, V75, P789

[3]

HUBLER GK, 1988, IN PRESS MAY P ASM C

[4]

IWAKI M, 1987, COMMUNICATION

[5] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[6] INSITU CHARACTERIZATION OF NUCLEATION, GROWTH, AND COMPOSITION OF ION-ASSISTED FILMS BY ELLIPSOMETRY, REFLECTANCE-TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY [J].

MARTIN, PJ ;

NETTERFIELD, RP ;

SAINTY, WG ;

PACEY, CG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :463-464

[7]

MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P461, DOI 10.1116/1.573906

[8] ION-BEAM-INDUCED EPITAXIAL VAPOR-PHASE GROWTH - A MOLECULAR-DYNAMICS STUDY [J].

MULLER, KH .

PHYSICAL REVIEW B, 1987, 35 (15) :7906-7913

[9] MECHANICAL PROPERTY AND STRUCTURE RELATIONSHIPS IN HARD COATINGS FOR CUTTING TOOLS [J].

QUINTO, DT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :2149-2157

[10] ION-BEAM SPUTTERING AND ITS APPLICATION FOR DEPOSITION OF SEMICONDUCTING FILMS [J].

WEISSMANTEL, C ;

FIEDLER, O ;

HECHT, G ;

REISSE, G .

THIN SOLID FILMS, 1972, 13 (02) :359-366

← 1 2 →