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INSITU CHARACTERIZATION OF NUCLEATION, GROWTH, AND COMPOSITION OF ION-ASSISTED FILMS BY ELLIPSOMETRY, REFLECTANCE-TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY

被引：5
作者：
MARTIN, PJ
NETTERFIELD, RP
SAINTY, WG
PACEY, CG
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573908
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：463 / 464
页数：2
相关论文
共 4 条
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HARPER, JME ;
CUOMO, JJ ;
KAUFMAN, HR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :737-756
[2]   ENHANCED GOLD FILM BONDING BY ION-ASSISTED DEPOSITION [J].
MARTIN, PJ ;
SAINTY, WG ;
NETTERFIELD, RP .
APPLIED OPTICS, 1984, 23 (16) :2668-2669
[3]   MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J].
MARTIN, PJ ;
NETTERFIELD, RP ;
SAINTY, WG .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) :235-241
[4]   CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY [J].
NETTERFIELD, RP ;
MARTIN, PJ ;
SAINTY, WG ;
DUFFY, RM ;
PACEY, CG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) :1995-2003
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