ENHANCED GOLD FILM BONDING BY ION-ASSISTED DEPOSITION

被引：27

作者：

MARTIN, PJ

SAINTY, WG

NETTERFIELD, RP

机构：

来源：

APPLIED OPTICS | 1984年 / 23卷 / 16期

关键词：

D O I：

10.1364/AO.23.002668

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2668 / 2669

页数：2

共 10 条

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