ION-BEAM-INDUCED EPITAXIAL VAPOR-PHASE GROWTH - A MOLECULAR-DYNAMICS STUDY

被引：274

作者：

MULLER, KH

机构：

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 15期

关键词：

D O I：

10.1103/PhysRevB.35.7906

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：7906 / 7913

页数：8

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共 28 条

[1] MODIFICATION OF NIOBIUM FILM STRESS BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION
CUOMO, JJ
HARPER, JME
GUARNIERI, CR
YEE, DS
ATTANASIO, LJ
ANGILELLO, J
WU, CT
HAMMOND, RH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 349 - 354
[2] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS
DIRKS, AG
LEAMY, HJ
[J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233
[3] ION-BEAM-INDUCED TEXTURE FORMATION IN VACUUM-CONDENSED THIN METAL-FILMS
DOBREV, D
[J]. THIN SOLID FILMS, 1982, 92 (1-2) : 41 - 53
[4] FIRSOV OB, 1958, SOV PHYS JETP-USSR, V6, P534
[5] ION-BEAM-ENHANCED ADHESION IN THE ELECTRONIC STOPPING REGION
GRIFFITH, JE
QIU, Y
TOMBRELLO, TA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (2-3): : 607 - 609
[6] HARPER JME, 1984, ION BOMBARDMENT MODI, P127
[7] ALGORITHM FOR CALCULATION OF CLASSICAL EQUATIONS OF MOTION OF AN N-BODY SYSTEM
HARRISON, DE
GAY, WL
EFFRON, HM
[J]. JOURNAL OF MATHEMATICAL PHYSICS, 1969, 10 (07) : 1179 - &
[8] SPUTTERING MODELS - A SYNOPTIC VIEW
HARRISON, DE
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4): : 1 - 64
[9] SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS
HENDERSON, D
BRODSKY, MH
CHAUDHARI, P
[J]. APPLIED PHYSICS LETTERS, 1974, 25 (11) : 641 - 643
[10] THE USE OF SPUTTERING AS A METHOD FOR ANALYZING SURFACE CHEMICAL-COMPOSITION - A MOLECULAR-DYNAMICS STUDY
HEYES, DM
BARBER, M
CLARKE, JHR
[J]. SURFACE SCIENCE, 1981, 105 (01) : 225 - 239