ION-BEAM-INDUCED EPITAXIAL VAPOR-PHASE GROWTH - A MOLECULAR-DYNAMICS STUDY

[21] MODELING ION-ASSISTED DEPOSITION OF CEO2 FILMS [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (04): : 209 - 213

[22] MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P184, DOI 10.1116/1.573468

[23] MULLER KH, 1986, J APPL PHYS, V59, P2803, DOI 10.1063/1.336960

[24] PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION [J]. APPLIED OPTICS, 1985, 24 (14): : 2267 - 2272

[25] UNBALANCED MAGNETRON ION-ASSISTED DEPOSITION AND PROPERTY MODIFICATION OF THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 504 - 508

[26] ROLE OF RELAXATION IN EPITAXIAL-GROWTH - A MOLECULAR-DYNAMICS STUDY [J]. PHYSICAL REVIEW LETTERS, 1985, 55 (06) : 604 - 606

[27] MOLECULAR-DYNAMICS ON VECTOR COMPUTERS [J]. JOURNAL OF COMPUTATIONAL PHYSICS, 1985, 61 (01) : 138 - 153

[28] ROLE OF IONS IN ION-BASED FILM FORMATION [J]. THIN SOLID FILMS, 1982, 92 (1-2) : 1 - 17

[21] MODELING ION-ASSISTED DEPOSITION OF CEO2 FILMS [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (04): : 209 - 213

[22] MULLER KH, 1986, J VAC SCI TECHNOL A, V4, P184, DOI 10.1116/1.573468

[23] MULLER KH, 1986, J APPL PHYS, V59, P2803, DOI 10.1063/1.336960

[24] PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION [J]. APPLIED OPTICS, 1985, 24 (14): : 2267 - 2272

[25] UNBALANCED MAGNETRON ION-ASSISTED DEPOSITION AND PROPERTY MODIFICATION OF THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 504 - 508

[26] ROLE OF RELAXATION IN EPITAXIAL-GROWTH - A MOLECULAR-DYNAMICS STUDY [J]. PHYSICAL REVIEW LETTERS, 1985, 55 (06) : 604 - 606

[27] MOLECULAR-DYNAMICS ON VECTOR COMPUTERS [J]. JOURNAL OF COMPUTATIONAL PHYSICS, 1985, 61 (01) : 138 - 153

[28] ROLE OF IONS IN ION-BASED FILM FORMATION [J]. THIN SOLID FILMS, 1982, 92 (1-2) : 1 - 17