MODELING ION-ASSISTED DEPOSITION OF CEO2 FILMS

[1] Biersack J.P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 73 - 94

[3] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[4] GUENTHER KH, 1976, APPL OPTICS, V15, P2992, DOI 10.1364/AO.15.002992

[5] SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (11) : 641 - 643

[6] Kubaschewski O., 1967, METALLURGICAL THERMO

[7] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 235 - 241

[8] MULLER KH, 1985, J APPL PHYS, V58, P2573, DOI 10.1063/1.335885

[9] MULLER KH, 1986, J APPL PHYS, V59, P2803, DOI 10.1063/1.336960

[10] PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION [J]. APPLIED OPTICS, 1985, 24 (14): : 2267 - 2272

[1] Biersack J.P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5

[2] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 73 - 94

[3] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[4] GUENTHER KH, 1976, APPL OPTICS, V15, P2992, DOI 10.1364/AO.15.002992

[5] SIMULATION OF STRUCTURAL ANISOTROPY AND VOID FORMATION IN AMORPHOUS THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (11) : 641 - 643

[6] Kubaschewski O., 1967, METALLURGICAL THERMO

[7] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) : 235 - 241

[8] MULLER KH, 1985, J APPL PHYS, V58, P2573, DOI 10.1063/1.335885

[9] MULLER KH, 1986, J APPL PHYS, V59, P2803, DOI 10.1063/1.336960

[10] PROPERTIES OF CEO2 THIN-FILMS PREPARED BY OXYGEN-ION-ASSISTED DEPOSITION [J]. APPLIED OPTICS, 1985, 24 (14): : 2267 - 2272