CONDUCTION MECHANISMS IN THIN-FILM ACCUMULATION-MODE SOI P-CHANNEL MOSFETS

被引:109
作者
COLINGE, JP
机构
[1] Interuniversity Micro-Electronics Center, Kapeldreef 75
关键词
D O I
10.1109/16.47777
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A model has been developed to explain conduction mechanisms in thin-film accumulation-mode SOI p-channel MOSFET's. It is found that, unlike that which occurs in thin-film fully depleted n-channel devices, there is little or no coupling between the front and back gates, unless the surface-state density is so high that the film remains depleted even when an accumulation channel is formed. The apparent front threshold shift is explained by back-gate modulation of a “body” current, flowing from the source to the drain. Indeed, the body of the device presents a p +-p–p + structure whose conductivity is controlled by the depth of the depletion zones arising from the top and the bottom of the silicon film. The model is used to calculate drain current as a function of front-and back-gate bias as well as output characteristics. © 1990 IEEE
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页码:718 / 723
页数:6
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