PROFILE AND GROOVE-DEPTH CONTROL IN GAAS DIFFRACTION GRATINGS FABRICATED BY PREFERENTIAL CHEMICAL ETCHING IN H2SO4-H2O2-H2O SYSTEM

被引：38

作者：

TSANG, WT

WANG, S

机构：

[1] UNIV CALIF, DEPT ELECT ENGN & COMP SCI, BERKELEY, CA 94720 USA

[2] UNIV CALIF, ELECTR RES LAB, BERKELEY, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 1976年 / 28卷 / 01期

关键词：

D O I：

10.1063/1.88569

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：44 / 46

页数：3

共 15 条

[1] GAAS-GAALAS DISTRIBUTED-FEEDBACK DIODE LASERS WITH SEPARATE OPTICAL AND CARRIER CONFINEMENT
AIKI, K
NAKAMURA, M
UMEDA, J
YARIV, A
KATZIR, A
YEN, HW
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (03) : 145 - 146
[2] SEMICONDUCTOR LASERS WITH LIGHT OUTPUT THROUGH DIFFRACTION GRATING ON SURFACE OF WAVEGUIDE LAYER
ALFEROV, ZI
ANDREYEV, VM
GUREVICH, SA
KAZARINOV, RF
LARIONOV, VR
MIZEROV, MN
PORTNOY, EL
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1975, QE11 (07) : 449 - 451
[3] LOW-DIVERGENCE BEAMS FROM GRATING-COUPLED COMPOSITE GUIDE HETEROSTRUCTURE GAAIAS DIODE LASERS
BURNHAM, RD
SCIFRES, DR
STREIFER, W
[J]. APPLIED PHYSICS LETTERS, 1975, 26 (11) : 644 - 647
[4] ROOM-TEMPERATURE OPERATION OF LOW-THRESHOLD SEPARATE-CONFINEMENT HETEROSTRUCTURE INJECTION LASER WITH DISTRIBUTED FEEDBACK
CASEY, HC
SOMEKH, S
ILEGEMS, M
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (03) : 142 - 144
[5] SELECTIVELY ETCHED DIFFRACTION GRATINGS IN GAAS
COMERFORD, L
ZORY, P
[J]. APPLIED PHYSICS LETTERS, 1974, 25 (04) : 208 - 210
[6] SELECTIVE ETCHING OF GALLIUM ARSENIDE CRYSTALS IN H2SO4-H2O2-H2O SYSTEM
LIDA, S
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (05) : 768 - &
[7] GAAS-ALXGAL-XAS INJECTION LASERS WITH DISTRIBUTED BRAGG REFLECTORS
REINHART, FK
LOGAN, RA
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (01) : 45 - 48
[8] COUPLING COEFFICIENTS AND PROPAGATION CONSTANTS IN GUIDED WAVE DISTRIBUTED-FEEDBACK LASERS
STREIFER, W
BURNHAM, RD
SCIFRES, DR
[J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (02) : 946 - 948
[9] PREFERENTIAL ETCHING AND ETCHED PROFILE OF GAAS
TARUI, Y
KOMIYA, Y
HARADA, Y
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (01) : 118 - &
[10] OPTICAL-WAVEGUIDES FABRICATED BY PREFERENTIAL ETCHING
TSANG, WT
TSENG, CC
WANG, S
[J]. APPLIED OPTICS, 1975, 14 (05): : 1200 - 1206

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