NEUTRAL STREAM EXTRACTION FROM ELECTRON-CYCLOTRON-RESONANCE PLASMA BY USING PARALLEL MAGNETIC-FIELD

被引：6

作者：

JIN, Y

TSUCHIZAWA, T

MATSUO, S

机构：

[1] NTT LSI Laboratories, Atsugi-shi, Kanagawa, 243-01

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1995年 / 34卷 / 4A期

关键词：

NEUTRAL STREAM; ECR ION STREAM; PARALLEL MAGNETIC FIELD; SI ETCHING; CHARGED PARTICLE; ECR PLASMA; CHARGE EXCHANGE REACTION; LOW-ENERGY;

D O I：

10.1143/JJAP.34.L465

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A low-energy neutral stream is generated by charge exchange reactions between the accelerated ions in an electron cyclotron resonance plasma stream and the background molecules and atoms. This stream is extracted using a parallel magnetic field to eliminate charged particles. Etched Si profiles demonstrate that this neutral stream has high directionality.

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收藏

页码：L465 / L467

页数：3

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