MASS-TRANSPORT IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - MELT MOTION DUE TO CRYSTAL-GROWTH AND BUOYANCY

被引:8
作者
HJELLMING, LN [1 ]
WALKER, JS [1 ]
机构
[1] UNIV ILLINOIS,DEPT ALLGEMEIN CHIRURG,URBANA,IL 61801
基金
美国国家科学基金会;
关键词
Crystals--Impurities - Magnetic Field Effects - Mass Transfer - Semiconductor Materials--Doping;
D O I
10.1016/0022-0248(88)90022-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The mass transport of dopants and impurities in a silicon melt is considered for a Czochralski crystal puller with a uniform axial magnetic field. For magnetic field strengths 1 B0 5 T, the dominant flow fields are those driven by buoyancy and the growth of the crystal. The mass transport is intrinsically unsteady, and the concentration of a crystallizing particle depends on the entire history of the particle. The buoyancy driven flow provides a mechanism for the circulation of fluid particles. However, the character of the flow in the diffusion boundary layers and the convection dominated core depends on the competition between the crystal growth and buoyancy driven velocities, which in turn depends on the magnetic field strength and depth.
引用
收藏
页码:371 / 389
页数:19
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