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SEEBECK AND PIEZORESISTANCE EFFECTS IN AMORPHOUS MICROCRYSTALLINE MIXED-PHASE SILICON FILMS AND APPLICATIONS TO POWER SENSORS AND STRAIN-GAUGES

被引：18
作者：
NISHIDA, S
KONAGAI, M
TAKAHASHI, K
机构：
来源：
THIN SOLID FILMS | 1984年 / 112卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90497-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：7 / 16
页数：10
相关论文
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