SINGLE-CRYSTAL SILICIDE SILICON INTERFACES - STRUCTURES AND BARRIER HEIGHTS

被引:44
作者
TUNG, RT
GIBSON, JM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词
D O I
10.1116/1.573372
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:987 / 991
页数:5
相关论文
共 28 条
  • [1] THE STRUCTURE AND PROPERTIES OF METAL-SEMICONDUCTOR INTERFACES
    Brillson, L. J.
    [J]. SURFACE SCIENCE REPORTS, 1982, 2 (02) : 123 - 326
  • [2] PHOTOEMISSION AND BAND-STRUCTURE RESULTS FOR NISI-2
    CHABAL, YJ
    HAMANN, DR
    ROWE, JE
    SCHLUTER, M
    [J]. PHYSICAL REVIEW B, 1982, 25 (12): : 7598 - 7602
  • [3] ATOMIC-STRUCTURE OF THE NISI2/(111)SI INTERFACE
    CHERNS, D
    ANSTIS, GR
    HUTCHISON, JL
    SPENCE, JCH
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1982, 46 (05): : 849 - 862
  • [4] THE ATOMIC-STRUCTURE OF THE NISI2-(001)SI INTERFACE
    CHERNS, D
    HETHERINGTON, CJD
    HUMPHREYS, CJ
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1984, 49 (01): : 165 - 177
  • [5] THE SCATTERING OF ELECTRONS BY ATOMS AND CRYSTALS .1. A NEW THEORETICAL APPROACH
    COWLEY, JM
    MOODIE, AF
    [J]. ACTA CRYSTALLOGRAPHICA, 1957, 10 (10): : 609 - 619
  • [6] Gibson J. M., 1983, MATER RES SOC S P, V14, P395
  • [7] GIBSON JM, 1982, APPL PHYS LETT, V41, P818, DOI 10.1063/1.93699
  • [8] HIGH RESOLUTION ELECTRON MICROSCOPY OF INTERFACES BETWEEN EPITAXIAL THIN FILMS AND SEMICONDUCTORS.
    Gibson, J.M.
    [J]. Ultramicroscopy, 1984, 14 (1-2) : 1 - 10
  • [9] THEORY OF SURFACE STATES
    HEINE, V
    [J]. PHYSICAL REVIEW, 1965, 138 (6A): : 1689 - &
  • [10] ISHIZAKA A, 1982, 2ND P INT S MOL BEAM, P183