HIGH-PRESSURE THERMAL OXIDE INP INTERFACE

被引：15

作者：

WILMSEN, CW ^{[1
]}

GEIB, KM ^{[1
]}

GANN, R ^{[1
]}

COSTELLO, J ^{[1
]}

HRYCKOWIAN, G ^{[1
]}

ZETO, RJ ^{[1
]}

机构：

[1] USA,ELECTR TECHNOL & DEVICES LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.583062

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1103 / 1106

页数：4

共 18 条

[1] XPS STUDY OF CHEMICALLY ETCHED GAAS AND INP
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01): : 28 - 33
[2] RAMAN-SCATTERING STUDIES OF GAAS NATIVE OXIDE INTERFACE
CAPE, JA
TENNANT, WE
HALE, LG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (04): : 921 - 923
[3] AN INVESTIGATION BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS OF CHEMICAL TREATMENTS OF THE (100) SURFACE OF N-TYPE INP EPITAXIAL LAYERS FOR LANGMUIR FILM DEPOSITION
CLARK, DT
FOK, T
ROBERTS, GG
SYKES, RW
[J]. THIN SOLID FILMS, 1980, 70 (02) : 261 - 283
[4] DETECTION OF EXCESS CRYSTALLINE AS AND SB IN III-V OXIDE INTERFACES BY RAMAN-SCATTERING
FARROW, RL
CHANG, RK
MROCZKOWSKI, S
POLLAK, FH
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (11) : 768 - 770
[5] THERMAL-OXIDATION OF INP AND PROPERTIES OF OXIDE FILM - COMMENT
GRIFFITHS, JE
SCHWARTZ, GP
SUNDER, WA
SCHONHORN, H
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1832 - 1833
[6] CHEMICAL CLEANING OF INP SURFACES - OXIDE COMPOSITION AND ELECTRICAL-PROPERTIES
GUIVARCH, A
LHARIDON, H
PELOUS, G
HOLLINGER, G
PERTOSA, P
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1139 - 1148
[7] THERMAL-OXIDATION OF INAS
LAUGHLIN, DH
WILMSEN, CW
[J]. THIN SOLID FILMS, 1980, 70 (02) : 325 - 332
[8] THE OXIDATION OF INTERMETALLIC COMPOUNDS .1. HIGH TEMPERATURE OXIDATION OF INSB
ROSENBERG, AJ
LAVINE, MC
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1960, 64 (09) : 1135 - 1142
[9] THE IN-P-O PHASE-DIAGRAM - CONSTRUCTION AND APPLICATIONS
SCHWARTZ, GP
SUNDER, WA
GRIFFITHS, JE
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (06) : 1361 - 1367
[10] RAMAN-SCATTERING STUDY OF THE THERMAL-OXIDATION OF INP
SCHWARTZ, GP
SUNDER, WA
GRIFFITHS, JE
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (10) : 925 - 927

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