ATOMIC MASS-SPECTROMETRY OF MATERIALS

被引：13

作者：

ANTHONY, JM ^{[1
]}

MATTESON, S ^{[1
]}

DUGGAN, JL ^{[1
]}

ELLIOTT, P ^{[1
]}

MARBLE, D ^{[1
]}

MCDANIEL, FD ^{[1
]}

WEATHERS, D ^{[1
]}

机构：

[1] N TEXAS STATE UNIV,DENTON,TX 76203

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 52卷 / 3-4期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-583X(90)90464-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Texas Instruments and the University of North Texas (UNT) are collaborating on the design of an accelerator mass spectrometry (AMS) system dedicated primarily to the analysis of impurities in electronic materials, and metals. An AMS beamline consisting of high-resolution magnetic (M/dM > 350) and electrostatic (E/dE > 700) analysis followed by a surface barrier detector has been installed on the NEC 9SDH pelletron at UNT, and a "clean" ion source is under development. An existing ion source (NEC Cs sputter source) has been used in conjunction with the AMS beamline to generate computer controlled molecule-free mass analyses of solid samples. Through a careful choice of isotopes and charge states a robust algorithm can be developed for removing molecular interferences from the mass analysis for essentially all materials. Examples using graphite, Si and CdZnTe are discussed.

引用

页码：493 / 497

页数：5

共 9 条

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