THE UNIVERSITY-OF-NORTH-TEXAS ATOMIC MASS-SPECTROMETRY FACILITY FOR DETECTION OF IMPURITIES IN ELECTRONIC MATERIALS AND METALS

被引:13
作者
MCDANIEL, FD
MATTESON, S
WEATHERS, DL
MARBLE, DK
DUGGAN, JL
ELLIOTT, PS
WILSON, DK
ANTHONY, JM
机构
[1] N TEXAS STATE UNIV,CTR MAT CHARACTERIZAT,DENTON,TX 76203
[2] TEXAS INSTRUMENTS INC,CENT RES LAB,DALLAS,TX 75265
基金
美国国家科学基金会;
关键词
D O I
10.1016/0168-583X(90)90428-W
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An accelerator mass spectrometry (AMS) facility is being developed at the University of North Texas through a collaboration between UNT and Texas Instruments Inc. The computer controlled AMS instrument will presently allow automatic mass scans of stable isotopes in solid materials using a conventional NEC SNICS ion source. Even though the SNICS ion source contaminates the sample, the AMS instrument allows molecular interference-free mass scans to be obtained with a higher sensitivity than SIMS for some elements. A new low sample contamination microbeam ion source under construction should allow sensitivities of ppt (1 part in 10(12) or 10(10) atoms/cm3) for any element in the periodic table, as well as sputter depth profiling and secondary electron imaging of a sample.
引用
收藏
页码:310 / 314
页数:5
相关论文
共 21 条
[1]   ACCELERATOR MASS-SPECTROMETRY SOLUTIONS TO SEMICONDUCTOR PROBLEMS [J].
ANTHONY, JM ;
DONAHUE, DJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 29 (1-2) :77-82
[2]   ACCELERATOR MASS-SPECTROMETRY AT THE UNIVERSITY-OF-NORTH-TEXAS [J].
ANTHONY, JM ;
MATTESON, S ;
MCDANIEL, FD ;
DUGGAN, JL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :731-733
[3]   DETECTION OF SEMICONDUCTOR DOPANTS USING ACCELERATOR MASS-SPECTROMETRY [J].
ANTHONY, JM ;
DONAHUE, DJ ;
JULL, AJT ;
ZABEL, TH .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) :498-500
[4]   ATOMIC MASS-SPECTROMETRY OF MATERIALS [J].
ANTHONY, JM ;
MATTESON, S ;
DUGGAN, JL ;
ELLIOTT, P ;
MARBLE, D ;
MCDANIEL, FD ;
WEATHERS, D .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 52 (3-4) :493-497
[5]   APPLICATIONS OF ACCELERATOR MASS-SPECTROMETRY TO ELECTRONIC MATERIALS [J].
ANTHONY, JM ;
MATTESON, SE ;
MARBLE, DK ;
DUGGAN, JL ;
MCDANIEL, FC ;
DONAHUE, DJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 50 (1-4) :262-266
[6]  
ANTHONY JM, 1986, MRS S P, V69, P311
[8]   THE UNIVERSITY-OF-NORTH-TEXAS ION-BEAM MODIFICATION AND ANALYSIS LABORATORY [J].
DUGGAN, JL ;
MCDANIEL, FD ;
MATTESON, S ;
GOLDEN, DE ;
ANTHONY, JM ;
GNADE, B ;
KEENAN, JA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :709-713
[9]   ANALYSIS OF CAUSES OF PULSE-HEIGHT DEFECT AND ITS MASS DEPENDENCE FOR HEAVY-ION SILICON DETECTORS [J].
FINCH, EC .
NUCLEAR INSTRUMENTS & METHODS, 1973, 113 (01) :41-49
[10]   COMPUTER AUTOMATION OF AN ACCELERATOR MASS-SPECTROMETRY SYSTEM [J].
GRESSETT, JD ;
MAXSON, DL ;
MATTESON, S ;
MCDANIEL, FD ;
DUGGAN, JL ;
MACKEY, HJ ;
ANTHONY, JM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :755-758