POROUS SILICON SUPERLATTICES

被引：69

作者：

FROHNHOFF, S

BERGER, MG

机构：

[1] Institut für Schicht- und Ionentechnik ISI, Forschungszentrum Jülich GmbH, Jülich

来源：

ADVANCED MATERIALS | 1994年 / 6卷 / 12期

关键词：

D O I：

10.1002/adma.19940061214

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Porous silicon superlattices (PSSs) are a novel type of silicon-based heterostructures, in which the porosity varies periodically with depth. The two different types of PSSs and their techniques of formation are described, as are their optical properties and an example of an application: a Fabry-Perot-type interference filter. In combination with light emitting porous silicon, PSSs are promising candidates for optoelectronic applications based on silicon technology.

引用

收藏

页码：963 / 965

页数：3

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