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ELECTRICAL-PROPERTIES MAXIMA IN THIN-FILMS OF THE LEAD ZIRCONATE LEAD TITANATE SOLID-SOLUTION SYSTEM

被引：166
作者：
CHEN, HD
UDAYAKUMAR, KR
GASKEY, CJ
CROSS, LE
机构：
[1] Materials Research Laboratory, Pennsylvania State University, University Park
来源：
APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 23期
关键词：
D O I：
10.1063/1.115263
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The piezoelectric strain coefficients have been measured as a function of composition for films in the PbZrO3-PbTiO3 (PZT) solid solution system, using a double-beam laser interferometry technique. This compositional dependence of piezoelectric, and the associated dielectric and ferroelectric properties for films 1 mu m in thickness with varying Zr/Ti ratio, deposited on platinized silicon substrates using a modified sol-gel route, corresponds to data reported for undoped PZT ceramics with respect to the effective morphotropic phase boundary composition. Films with composition near the morphotropic phase boundary, Pb(Zr0.52Ti0.48)O-3, show enhanced values of the longitudinal piezoelectric coefficient, 194 pC/N; dielectric permittivity, 1310; and remanent polarization, 36 mu C/cm(2). (C) 1995 American Institute of Physics.
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页码：3411 / 3413
页数：3
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