ELECTRICAL-PROPERTIES MAXIMA IN THIN-FILMS OF THE LEAD ZIRCONATE LEAD TITANATE SOLID-SOLUTION SYSTEM

被引：166

作者：

CHEN, HD

UDAYAKUMAR, KR

GASKEY, CJ

CROSS, LE

机构：

[1] Materials Research Laboratory, Pennsylvania State University, University Park

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 23期

关键词：

D O I：

10.1063/1.115263

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The piezoelectric strain coefficients have been measured as a function of composition for films in the PbZrO3-PbTiO3 (PZT) solid solution system, using a double-beam laser interferometry technique. This compositional dependence of piezoelectric, and the associated dielectric and ferroelectric properties for films 1 mu m in thickness with varying Zr/Ti ratio, deposited on platinized silicon substrates using a modified sol-gel route, corresponds to data reported for undoped PZT ceramics with respect to the effective morphotropic phase boundary composition. Films with composition near the morphotropic phase boundary, Pb(Zr0.52Ti0.48)O-3, show enhanced values of the longitudinal piezoelectric coefficient, 194 pC/N; dielectric permittivity, 1310; and remanent polarization, 36 mu C/cm(2). (C) 1995 American Institute of Physics.

引用

页码：3411 / 3413

页数：3

共 19 条

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