MODIFIED SOL-GEL PROCESS FOR PREPARATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS

A modified precursor preparation method is suggested for sol-gel processing of better quality PZT thin films. The PZT precursor, prepared using Pb acetate, Ti isopropoxide and Zr n-propoxide, was modified by changing the order of precursor mixing. It was found that there was a dramatic change in the shelf-life of the precursor and in the electrical properties of the PZT films. The processing parameters have been optimized and a sol-gel processing technique is suggested to obtain consistent and high quality PZT films. The films show improved electrical properties.