PERFORMANCE OF LAYERED SYNTHETIC MICROSTRUCTURES IN MONOCHROMATOR APPLICATIONS IN THE SOFT-X-RAY REGION

被引：16

作者：

PIANETTA, P ^{[1
]}

BARBEE, TW ^{[1
]}

REDAELLI, R ^{[1
]}

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1986年 / 246卷 / 1-3期

关键词：

D O I：

10.1016/0168-9002(86)90105-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：352 / 355

页数：4

共 9 条

[1]

Barbee T.W., 1984, SPRINGER SERIES OPTI, V43, P144

[2]

DAY RH, 1981, LA7941MSUC21 LOS AL

[3]

HENKE BL, 1982, AT DATA NUCL DATA TA, V27

[4]

JAEGER RP, 1984, P SOC PHOTO-OPT INST, V471, P121, DOI 10.1117/12.942338

[5]

PIANETTA P, 1985, P SOC PHOTO-OPT INST, V537, P69, DOI 10.1117/12.947487

[6] X-RAY-LITHOGRAPHY AT THE STANFORD SYNCHROTRON RADIATION LABORATORY [J].

PIANETTA, P ;

REDAELLI, R ;

JAEGER, R ;

BARBEE, TW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :641-643

[7] DESIGN CONSIDERATIONS FOR THE X-RAY-LITHOGRAPHY STATION AT THE STANFORD SYNCHROTRON RADIATION LABORATORY [J].

PIANETTA, P ;

TATCHYN, R ;

JAEGER, R ;

BARBEE, TW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) :355-358

[8] MODELING OF PLANAR TRANSMISSION-TYPE DIFFRACTION GRATINGS COMPATIBLE WITH SYNCHROTRON RADIATION SOURCES [J].

TATCHYN, R ;

LINDAU, I .

NUCLEAR INSTRUMENTS & METHODS, 1980, 172 (1-2) :287-291

[9] SOFT-X-RAY MICROSCOPY-LITHOGRAPHY BRANCH LINE AT SSRL [J].

WARBURTON, WK .

NUCLEAR INSTRUMENTS & METHODS, 1980, 172 (1-2) :387-391

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