POLYIMIDE LIFTOFF TECHNOLOGY FOR HIGH-DENSITY LSI METALLIZATION

被引:11
作者
HOMMA, Y [1 ]
NOZAWA, H [1 ]
HARADA, S [1 ]
机构
[1] HITACHI LTD,MOBARA,CHIBA 297,JAPAN
关键词
D O I
10.1109/T-ED.1981.20381
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:552 / 556
页数:5
相关论文
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