PROPERTIES OF CONDUCTING ZINC-OXIDE FILMS PREPARED BY SPUTTERING,R.F.

被引：6

作者：

NAYAR, PS ^{[1
]}

机构：

[1] UNIV DELAWARE,INST ENERGY CONVERS,NEWARK,DE 19711

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1982年 / 11卷 / 06期

关键词：

D O I：

10.1007/BF02658910

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：967 / 977

页数：11

共 31 条

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