FRICTIONAL AND MORPHOLOGICAL PROPERTIES OF AU-MOS2 FILMS SPUTTERED FROM A COMPACT TARGET

被引：140

作者：

SPALVINS, T

机构：

来源：

THIN SOLID FILMS | 1984年 / 118卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90207-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：375 / 384

页数：10

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