MORPHOLOGICAL AND FRICTIONAL BEHAVIOR OF SPUTTERED MOS2 FILMS

被引：124

作者：

SPALVINS, T

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90208-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：17 / 24

页数：8

共 8 条

[1] SPUTTERED MOS2 LUBRICANT COATING IMPROVEMENTS
CHRISTY, RI
[J]. THIN SOLID FILMS, 1980, 73 (02) : 299 - 307
[2] LAMMER J, 1979, 1979 P INT C ION PLA, P204
[3] LAVIK MT, 1972, ASLE TRANS, V15, P233
[4] NISHIMURA M, 1978, 2ND P INT C SOL LUBR, P128
[5] SPALVINS T, 1974, ASLE TRANS, V17, P1
[6] TRIBOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS IN RELATION TO FILM MORPHOLOGY
SPALVINS, T
[J]. THIN SOLID FILMS, 1980, 73 (02) : 291 - 297
[7] SPALVINS T, 1971, ASLE TRANS, V14, P267
[8] SYNERGISTIC EFFECTS OF METALS CO-SPUTTERED WITH MOS2
STUPP, BC
[J]. THIN SOLID FILMS, 1981, 84 (03) : 257 - 266