NOVEL MICROSCOPY USING STIMULATED LIGHT-SCATTERING BY LASER-INDUCED TRANSIENT REFLECTING GRATINGS ON METALLIC SURFACES

被引：19

作者：

HARATA, A

SAWADA, T

机构：

[1] Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo, Bunkyo, Tokyo 113

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 17期

关键词：

D O I：

10.1063/1.105074

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel microscopic method, based on the technique of laser-induced transient reflecting gratings, is proposed to monitor ion implantation in silicon by noncontact and nondestructive ways. Some unique advantages of this technique, such as high sensitivity to ion dose and potential real time imaging capability, are demonstrated.

引用

页码：1839 / 1841

页数：3

共 15 条

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