LOW-ENERGY ION-SCATTERING SPECTROMETRY (ISS) OF SIO2-SI INTERFACE

被引：78

作者：

HARRINGTON, WL ^{[1
]}

HONIG, RE ^{[1
]}

GOODMAN, AM ^{[1
]}

WILLIAMS, R ^{[1
]}

机构：

[1] RCA LABS,PRINCETON,NJ 08540

来源：

APPLIED PHYSICS LETTERS | 1975年 / 27卷 / 12期

关键词：

D O I：

10.1063/1.88345

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：644 / 645

页数：2

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