COMPOUND FORMATION EFFECTS IN COMPUTING IMPLANTATION PROFILES

被引：30

作者：

ARMINI, AJ

BUNKER, SN

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 115卷

关键词：

D O I：

10.1016/0921-5093(89)90658-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：67 / 71

页数：5

共 9 条

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[7] ENERGY-DEPENDENCE OF THE ION-INDUCED SPUTTERING YIELDS OF MONATOMIC SOLIDS [J].

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