A STUDY OF THE ELECTRICAL CHARACTERISTICS, BEFORE ELECTROFORMING, OF THIN SIOX FILMS WITH LATERALLY-SPACED ELECTRODES

被引：11

作者：

ALISMAIL, SAY

HOGARTH, CA

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1983年 / 18卷 / 09期

关键词：

D O I：

10.1007/BF00547595

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：2777 / 2784

页数：8

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