EXPERIMENTAL-DETERMINATION OF THE TEMPERATURE-DEPENDENCE OF ARGON ANNEALED FIXED OXIDE CHARGE AT THE SI/SIO2 INTERFACE

被引：10

作者：

AKINWANDE, AI

HO, CP

PLUMMER, JD

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 03期

关键词：

D O I：

10.1063/1.95165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：263 / 265

页数：3

共 20 条

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