AN INTEGRATED HYDROGEN-SWITCHING SENSOR WITH A PD-SI TUNNEL MIS STRUCTURE

被引：15

作者：

OGITA, M ^{[1
]}

YE, DB ^{[1
]}

KAWAMURA, K ^{[1
]}

YAMAMOTO, T ^{[1
]}

机构：

[1] SHIZUOKA UNIV,ELECTR RES INST,HAMAMATSU,SHIZUOKA 432,JAPAN

来源：

SENSORS AND ACTUATORS | 1986年 / 9卷 / 02期

关键词：

D O I：

10.1016/0250-6874(86)80017-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：157 / 164

页数：8

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[9] HYDROGEN-SENSITIVE MOS FIELD-EFFECT TRANSISTOR [J].

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