A HIGH-STABILITY AND LOW DRIFT ATOMIC FORCE MICROSCOPE

被引：15

作者：

HUG, HJ

JUNG, T

GUNTHERODT, HJ

机构：

[1] Institut für Physik, Universität Basel, CH-4056 Basel

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 08期

关键词：

D O I：

10.1063/1.1143288

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 [仪器科学与技术]; 080401 [精密仪器及机械]; 081102 [检测技术与自动化装置];

摘要：

Impressed by the high resolution and easy operation of the new generation scanning tunneling microscopes (STMs), we built a pocket-size high-stability atomic force microscope (AFM) with deflection measurement by tunneling. It was our aim to reach high mechanical and thermal stability of the tunnel junction as well as full compatibility with our existing STM system. Our first AFM scanhead, designed for large scan ranges up to 15-mu-m, stably measured an artificial grid structure on SiO2, reproducibly showing details of less than 1 nm in size. On this well-defined sample we compared constant force with variable deflection measurements.

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收藏

页码：3900 / 3904

页数：5

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