DETERMINATION OF THE HYDROGEN CONCENTRATION IN SILICON-NITRIDE FILMS WITH THE RESONANT NUCLEAR-REACTION H-1(N-15,ALPHA-GAMMA)C-12

被引：4

作者：

EVERS, EJ ^{[1
]}

HABRAKEN, FHPM ^{[1
]}

机构：

[1] RIJKSUNIV UTRECHT,DEPT TECH PHYS,3508 TA UTRECHT,NETHERLANDS

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1984年 / 39卷 / 12期

关键词：

D O I：

10.1016/0584-8547(84)80181-0

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：1553 / 1556

页数：4

共 9 条

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