共 7 条
[1]
GERNER CM, 1979, J APPL PHYS, V50, P3383
[2]
SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1982, 20 (01)
:80-83
[4]
FET FABRICATION USING MASKLESS ION-IMPLANTATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:916-920
[5]
A 100 KV MASKLESS ION-IMPLANTATION SYSTEM WITH AN AU-SI-BE LIQUID-METAL ION-SOURCE FOR III-V-COMPOUND SEMICONDUCTORS
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1983, 22 (05)
:L287-L288
[6]
NAMBA S, P INT ION ENG C ISIA, V3, P1533
[7]
SELIGER RL, 1979, J VAC SCI TECHNOL, V16, P1618