NOVEL METHOD FOR MEASURING INTENSITY DISTRIBUTION OF FOCUSED ION-BEAMS

被引:15
作者
ARIMOTO, H
TAKAMORI, A
MIYAUCHI, E
HASHIMOTO, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 12期
关键词
D O I
10.1143/JJAP.22.L780
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L780 / L782
页数:3
相关论文
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