PLANARIZING OF PHOSPHOSILICATE GLASS-FILMS ON PATTERNED SILICON-WAFERS

被引：7

作者：

JOHNSON, LF

INGERSOLL, KA

DALTON, JV

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582631

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：487 / 489

页数：3

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[7]

NABER CT, 1972, J ELECTROCHEM SOC, V119, P302

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