THE INFLUENCE OF PLURAL SCATTERING ON EELS ELEMENTAL ANALYSIS

被引:12
作者
SU, DS
WANG, HF
ZEITLER, E
机构
[1] Fritz-Haber-Institut der Max-Planck-Gesellschaft, D-14195 Berlin
关键词
D O I
10.1016/0304-3991(95)00027-X
中图分类号
TH742 [显微镜];
学科分类号
摘要
Measured atomic ratios show deviations from the stoichiometric ratios that increase with sample thickness. This paper confirms by calculation that plural scattering is responsible for this fact. The dependence on the experimental parameters like energy window and collection aperture becomes obvious. Attempts are made to provide numerical correction factors which allow more reliable EELS determination also for thick samples.
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收藏
页码:181 / 190
页数:10
相关论文
共 17 条
[1]   EXPERIMENTAL ENERGY-LOSS FUNCTION, IM[-1/EPSILON(Q,OMEGA)], FOR ALUMINUM [J].
BATSON, PE ;
SILCOX, J .
PHYSICAL REVIEW B, 1983, 27 (09) :5224-5239
[2]   ELEMENTAL ANALYSIS OF THICK AMORPHOUS SPECIMENS BY EELS [J].
CHENG, SC ;
EGERTON, RF .
MICRON, 1993, 24 (03) :251-256
[3]   THICK SPECIMENS IN CEM AND STEM .1. CONTRAST [J].
CREWE, AV ;
GROVES, T .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (08) :3662-3672
[4]   EELS OF THICK SPECIMENS [J].
EGERTON, RF ;
YANG, YY ;
CHEN, FYY .
ULTRAMICROSCOPY, 1991, 38 (3-4) :349-352
[5]  
EGERTON RF, 1989, ELECTRON ENERGY LOSS
[6]   QUANTIFICATION OF ELECTRON ENERGY-LOSS SPECTRA WITH K-SHELL AND L-SHELL IONIZATION CROSS-SECTIONS [J].
HOFER, F ;
GOLOB, P .
MICRON AND MICROSCOPICA ACTA, 1988, 19 (02) :73-86
[7]   RECENT EVOLUTION OF HVEM IN FRANCE [J].
JOUFFREY, B .
ULTRAMICROSCOPY, 1991, 39 (1-4) :21-31
[8]  
Landau L, 1944, J PHYS-USSR, V8, P201
[9]  
LENZ F, 1954, Z NATURFORSCH A, V9, P185