INTERFACIAL REACTIONS BETWEEN AU AND HYDROGENATED AMORPHOUS SI

被引:46
作者
TSAI, CC
NEMANICH, RJ
THOMPSON, MJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 02期
关键词
D O I
10.1116/1.571802
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:632 / 636
页数:5
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