THROUGH-WAFER OPTICAL COMMUNICATION USING MONOLITHIC INGAAS-ON-SI LEDS AND MONOLITHIC PTSI-SI SCHOTTKY-BARRIER DETECTORS

被引:8
作者
TURNER, GW
CHEN, CK
TSAUR, BY
WAXMAN, AM
机构
[1] Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA
关键词
D O I
10.1109/68.84478
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Through-wafer optical communication has been demonstrated in experiments employing two vertically stacked Si wafers, the upper one with In0.15Ga0.85As-In0.15Al0.85As double-heterostructure LED's grown by molecular beam epitaxy on its top surface and the lower one with PtSi-Si Schottky-barrier detectors fabricated on its bottom surface. Infrared radiation emitted by the LED's in a band peaking at 1.12-mu-m, just beyond the Si absorption edge, is transmitted through the upper Si wafer, focused with a 25-mm focal-length lens, transmitted through the lower Si wafer, and detected by the Pt-Si detectors. For a single LED-detector pair, the detector signal-to-noise ratio was 10:1 for an LED drive current of 1 mA at room temperature. This observation, together with initial results on LED reliability, signal modulation, and array uniformity, suggests that through-wafer communication using LED's and Schottky-barrier detectors is a promising approach for optical interconnects in stacked wafer architectures. Such three-dimensional architectures are significant for both conventional and neuromorphic computing systems.
引用
收藏
页码:761 / 763
页数:3
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