PROPERTIES OF ZNS THIN-FILMS GROWN BY IONIZED-CLUSTER BEAM DEPOSITION

被引:2
作者
OHKAWA, Y
OKI, K
WAKITANI, M
MIURA, S
UMEDA, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 09期
关键词
D O I
10.1143/JJAP.21.L551
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L551 / L552
页数:2
相关论文
共 6 条
[1]  
MORIMOTO K, 1978, J CRYST GROWTH, V45, P332
[2]  
SUYAMA T, 1982, JPN J APPL PHYS, V21, P383, DOI 10.7567/JJAPS.21S1.383
[3]   IONIZED-CLUSTER BEAM DEPOSITION [J].
TAKAGI, T ;
YAMADA, I ;
SASAKI, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1128-1134
[4]   IONIZED-CLUSTER BEAM DEPOSITION AND EPITAXY AS FABRICATION TECHNIQUES FOR ELECTRON DEVICES [J].
TAKAGI, T ;
YAMADA, I ;
SASAKI, A .
THIN SOLID FILMS, 1977, 45 (03) :569-576
[5]  
TAKAGI T, 1976, 1976 TECH DIG INT EL, P605
[6]  
TAKAGI T, 1972, 2ND P INT C ION SOUR, P790