SUPPRESSION OF PLATINUM PENETRATION FAILURE IN TI/PT/AU BEAM LEAD METAL SYSTEMS USING A TIN DIFFUSION BARRIER

被引：13

作者：

KANAMORI, S

MATZUMOTO, T

机构：

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 03期

关键词：

D O I：

10.1016/0040-6090(83)90238-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：205 / 213

页数：9

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