ELLIPSOMETRIC INVESTIGATION OF THE OPTICAL PROPERTIES OF ANODIC OXIDE FILMS ON TANTALUM

被引：14

作者：

KUMAGAI, S

YOUNG, L

机构：

来源：

关键词：

D O I：

10.1149/1.2426016

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1411 / 1416

页数：6

共 10 条

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[2] OPTICAL CONSTANTS OF GERMANIUM - 3600-A TO 7000-A
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[3] KINETICS OF FORMATION OF ANODIC OXIDE FILMS ON TANTALUM
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[4] REFRACTIVE INDEX OF NON-UNIFORM FILMS
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KELLY, JC
[J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1958, 72 (467): : 906 - 908
[5] OPTICAL PROPERTIES OF ANODIC OXIDE FILMS ON TANTALUM, NIOBIUM, AND TANTALUM + NIOBIUM ALLOYS, AND THE OPTICAL CONSTANTS OF TANTALUM
MASING, L
ORME, JE
YOUNG, L
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (05) : 428 - 438
[6] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +
[7] OPTICAL MEASUREMENT OF OXIDE THICKNESS ON TITANIUM
MENARD, RC
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (04) : 427 - &
[8] VONWARTENBERG H, 1910, BER DTSCH PHYS GES, V12, P105
[9] WINTERBOTTOM AB, 1955, DET KGL NORSKE VIDEN, V1, P1
[10] Young L, 1961, ANODIC OXIDE FILMS