GENERATION OF INTERFACE STATES DUE TO EMISSION OF LEAKAGE ELECTRONS FROM SILICON SUBSTRATE INTO SILICON DIOXIDE

被引:6
作者
HUANG, HCW [1 ]
机构
[1] IBM CORP,DIV SYST PROD,ESSEX JUNCTION,VT 05452
关键词
D O I
10.1063/1.89224
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:533 / 535
页数:3
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