EXCIMER LASER-INDUCED DEPOSITION OF INP - CRYSTALLOGRAPHIC AND MECHANISTIC STUDIES

被引：47

作者：

DONNELLY, VM ^{[1
]}

BRASEN, D ^{[1
]}

APPELBAUM, A ^{[1
]}

GEVA, M ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 05期

关键词：

D O I：

10.1063/1.336011

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2022 / 2035

页数：14

共 41 条

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