PROBE PENETRATION IN SPREADING RESISTANCE MEASUREMENTS

被引：6

作者：

VANDERVORST, WB ^{[1
]}

MAES, HE ^{[1
]}

机构：

[1] CATHOLIC UNIV LEUVEN,ESAT,B-3030 HEVERLE,BELGIUM

来源：

关键词：

D O I：

10.1063/1.334168

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1583 / 1590

页数：8

共 20 条

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[4] EHRSTEIN JR, 1978, NONDESTRUCTIVE CHARA, pCH1
[5] PREPARATION AND EVALUATION OF SPREADING RESISTANCE PROBE TIP
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[6] CONSTRICTION RESISTANCE AND REAL AREA OF CONTACT
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[J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1966, 17 (12): : 1621 - +
[7] GRUBER GA, 1981, MAR P MICR MEAS TECH
[8] HENDRICKSON TE, 1976, SPR M EL SOC, V76, P307
[9] KEENAN WA, 1966, OHMIC CONTACTS SEMIC, P269
[10] INFLUENCE OF TEMPERATURE ON SPREADING RESISTANCE MEASUREMENT
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[J]. SOLID-STATE ELECTRONICS, 1972, 15 (07) : 757 - &