SURFACE CHEMICAL CHARACTERIZATION BY AUGER SIGNAL DECOMPOSITION - SILICON-NITRIDE

被引：12

作者：

MADDEN, HH

NELSON, GC

机构：

来源：

APPLICATIONS OF SURFACE SCIENCE | 1982年 / 11-2卷 / JUL期

关键词：

D O I：

10.1016/0378-5963(82)90089-7

中图分类号：

学科分类号：

摘要：

引用

页码：408 / 419

页数：12

共 29 条

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