DYNAMIC IMAGING MICROELLIPSOMETRY - THEORY, SYSTEM-DESIGN, AND FEASIBILITY DEMONSTRATION

被引：54

作者：

COHN, RF ^{[1
]}

WAGNER, JW ^{[1
]}

KRUGER, J ^{[1
]}

机构：

[1] JOHNS HOPKINS UNIV, DEPT MAT SCI & ENGN, BALTIMORE, MD 21218 USA

来源：

APPLIED OPTICS | 1988年 / 27卷 / 22期

关键词：

D O I：

10.1364/AO.27.004664

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：4664 / 4671

页数：8

共 14 条

[1] Azzam RMA., 1999, ELLIPSOMETRY POLARIZ
[2] DYNAMIC IMAGING MICROELLIPSOMETRY - PROOF OF CONCEPT TEST-RESULTS
COHN, RF
WAGNER, JW
KRUGER, J
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (04) : 1033 - 1034
[3] DAHLQUIST G, 1974, NUMERICAL METHODS, P30
[4] DUNLAVY DJ, 1981, LAUR811806 LOS AL NA
[5] SPATIALLY RESOLVED ELLIPSOMETRY
ERMAN, M
THEETEN, JB
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) : 859 - 873
[6] HAUGE P, 1973, IBM J RES DEV NOV, P472
[7] OPTICAL SOL-GEL COATINGS - ELLIPSOMETRY OF FILM FORMATION
HURD, AJ
BRINKER, CJ
[J]. JOURNAL DE PHYSIQUE, 1988, 49 (06): : 1017 - 1025
[8] KRUGER J, 1973, ADV ELECTROCHEMISTRY, V9
[9] McBee C. L., 1974, LOCALIZED CORRO NACE, P252
[10] ELLIPSOMETRIC-SPECTROSCOPY OF FILMS FORMED ON METALS IN SOLUTION
MCBEE, CL
KRUGER, J
[J]. SURFACE SCIENCE, 1969, 16 : 340 - &