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UNIQUE METHOD OF PATTERNING SUPERCONDUCTING THIN-FILMS BY SELECTIVE GROWTH OF Y-BA-CU-O

被引：9
作者：
HATANO, T
FUJIMAKI, A
TAKAI, Y
HAYAKAWA, H
机构：
[1] Department of Electronics Engineering, Nagoya University, Chikusa-ku, Nagoya, 464-01, Furo-cho
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期
关键词：
Oxide superconductor; Patterning; Selective growth; Si0[!sub]2[!/sub; Thin film; Y-Ba-Cu-0;
D O I：
10.1143/JJAP.29.1076
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new method of patterning superconducting thin films by the selective growth of YBaCuO has been developed. Films deposited on MgO substrates are superconductive, while films on SiO2 films have the insulative properties. The results of X-ray diffraction and Auger electron spectroscopy analyses show that the insulative properties are due to the intermixing of YBaCuO films and SiO2 films. A superconducting line of 15 µm wide has the transition temperature of zero resistance at 72 K and the critical current density of 3.26×106 A/cm2 at 4.2 K. © 1990 The Japan Society of Applied Physics.
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收藏
页码：1076 / 1079
页数：4
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