STRUCTURAL AND RESISTIVITY CHANGES IN HEAT-TREATED CHROMIUM-GOLD FILMS

被引：25

作者：

MUNITZ, A ^{[1
]}

KOMEM, Y ^{[1
]}

机构：

[1] TECHNION,DEPT MAT ENGN,HAIFA 32000,ISRAEL

来源：

关键词：

D O I：

10.1016/0040-6090(76)90180-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 179

页数：9

共 12 条

[1]

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[2]

de Angelis R. J., 1973, Metallography, V6, P439

[3]

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[4] GRAIN BOUNDARY DIFFUSION EFFECTS IN FILMS OF GOLD ON CHROMIUM [J].

KENRICK, PS .

[5] THIN-FILM METALLIZATION OF OXIDES IN MICROELECTRONICS [J].

MATTOX, DM .

[6]

MUNITZ A, TO BE PUBLISHED

RAIRDEN, JR ;

NEUGEBAU.CA ;

SIGSBEE, RA .

METALLURGICAL TRANSACTIONS, 1971, 2 (03) :719-+

[8]

SCHNABLE GL, 1968, RODC66165 TECHN REP, P58

[9]

SCHWARTZ N, 1964, PHYS THIN FILMS, V2, P363

THOMAS, K ;

ROBERTS, MW .