X-RAY PHOTOELECTRON-SPECTROSCOPY OF MICROMETER-SIZE SURFACE-AREA USING SYNCHROTRON RADIATION

被引：5

作者：

NINOMIYA, K

HIRAI, Y

MOMOSE, A

AOKI, S

SUZUKI, K

机构：

[1] HITACHI LTD, ADV RES LAB, HATOYAMA, SAITAMA 350, JAPAN

[2] UNIV TSUKUBA, INST APPL PHYS, SAKURA, IBARAKI 305, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 06期

关键词：

Focused X-ray beam; Wolter type mirror; Xps;

D O I：

10.1143/JJAP.29.L1026

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An axisymmetric Wolter type I mirror was used at a synchrotron radiation beamline in order to produce a focused X-ray beam with a photon energy of 150 eV. An FWHM (full width at half maximum) of 4 µm was achieved in the beam intensity profile. A Si(2p) XPS spectrum was then observed for a Si sample with this focused beam. This is the first microscopic XPS measurement in the micrometer range that has been achieved using a Wolter type mirror. © 1990 The Japan Society of Applied Physics.

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页码：L1026 / L1028

页数：3

相关论文

共 18 条

[1] IMAGING CHARACTERISTICS OF A REPLICATED WOLTER TYPE .1. X-RAY MIRROR DESIGNED FOR LASER PLASMA DIAGNOSTICS [J].

AOKI, S ;

SHIOZAWA, M ;

KAMIGAKI, K ;

HASHIMOTO, H ;

KOKAJI, M ;

SETSUHARA, Y ;

AZECHI, H ;

YAMANAKA, M ;

YAMANAKA, T ;

IZAWA, Y ;

YAMANAKA, C .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (06) :952-954

[2] PHOTOELECTRON SPECTROMICROSCOPY [J].

BEAMSON, G ;

PORTER, HQ ;

TURNER, DW .

NATURE, 1981, 290 (5807) :556-561

[3]

CERRINA F, 1989, 36TH NAT S, P189

[4] DEVELOPMENT OF A SCANNING-X-RAY MICROPROBE WITH SYNCHROTRON RADIATION [J].

HAYAKAWA, S ;

IIDA, A ;

AOKI, S ;

GOHSHI, Y .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :2452-2455

[5] SOFT-X-RAY ANALYSIS SYSTEM FOR REFLECTION, SECONDARY-ELECTRON, AND FLUORESCENCE SPECTROSCOPY [J].

HIRAI, Y ;

WAKI, I ;

MOMOSE, A ;

HAYAKAWA, K .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07) :2219-2222

[6] SOFT-X-RAY MONOCHROMATOR WITH A VARIED-SPACE PLANE GRATING FOR SYNCHROTRON RADIATION - DESIGN AND EVALUATION [J].

ITOU, M ;

HARADA, T ;

KITA, T .

APPLIED OPTICS, 1989, 28 (01) :146-153

[7]

Lindau I., 1980, Synchrotron radiation research, P159

[8]

MICHETTE AG, 1986, OPTICAL SYSTEMS SOFT, P37

[9] FABRICATION OF AN AXISYMMETRIC WOLTER TYPE-I MIRROR WITH A GOLD DEPOSITED REFLECTING SURFACE [J].

NINOMIYA, K ;

HONDA, K ;

AOKI, S ;

NISHIMATSU, S ;

SUZUKI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1989, 28 (11) :2303-2308

[10] AN EXPERIMENTAL SYSTEM FOR SURFACE-REACTION STUDIES IN MICROWAVE PLASMA-ETCHING [J].

NINOMIYA, K ;

SUZUKI, K ;

NISHIMATSU, S ;

GOTOH, Y ;

OKADA, O .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :645-652