IMPROVEMENT IN THE BORON DOPING EFFICIENCY OF HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS USING BF3

被引：10

作者：

ASANO, A

SAKAI, H

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 10期

关键词：

D O I：

10.1063/1.100803

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：904 / 906

页数：3

共 19 条

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