A STUDY OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY HOT-WALL GLOW-DISCHARGE

被引：11

作者：

BOULITROP, F ^{[1
]}

PROUST, N ^{[1
]}

MAGARINO, J ^{[1
]}

CRITON, E ^{[1
]}

PERAY, JF ^{[1
]}

DUPRE, M ^{[1
]}

机构：

[1] THOMSON CSF,DIV HYBRIDE & MICROONDE,F-91401 ORSAY,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 09期

关键词：

D O I：

10.1063/1.335773

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3494 / 3498

页数：5

共 20 条

[1] Amer N. M., 1984, HYDROGENATED AMORPHO
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[3] DISORDER AND DENSITY OF DEFECTS IN HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS
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[4] DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON
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[J]. PHYSICAL REVIEW LETTERS, 1981, 47 (20) : 1480 - 1483
[5] DREVILLON B, 1984, UNPUB MRS C BOSTON
[6] DIRECT SPECTROSCOPIC DETERMINATION OF THE DISTRIBUTION OF OCCUPIED GAP STATES IN A-SI-H
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LEY, L
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 253 - 256
[7] THICKNESS DEPENDENCE OF ELECTRICAL AND OPTICAL-PROPERTIES AND ELECTRON-SPIN-RESONANCE IN UNDOPED A-SI-H
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[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (03): : 239 - 251
[8] DIRECT MEASUREMENT OF GAP-STATE ABSORPTION IN HYDROGENATED AMORPHOUS-SILICON BY PHOTOTHERMAL DEFLECTION SPECTROSCOPY
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AMER, NM
[J]. PHYSICAL REVIEW B, 1982, 25 (08): : 5559 - 5562
[9] PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND DETECTION
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AMER, NM
BOCCARA, AC
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[J]. APPLIED OPTICS, 1981, 20 (08): : 1333 - 1344
[10] OPTICAL-ABSORPTION SPECTRA OF SURFACE OR INTERFACE STATES IN HYDROGENATED AMORPHOUS-SILICON
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BIEGELSEN, DK
NEMANICH, RJ
KNIGHTS, JC
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (01) : 105 - 107

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